3/15/2010	10:08:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	10:08:46 AM	Recipe started at 10:08 AM
3/15/2010	10:08:46 AM	H2 valve closed
3/15/2010	10:08:46 AM	BCl3 valve closed
3/15/2010	10:08:46 AM	PH3 valve closed
3/15/2010	10:08:46 AM	SiCl4 pre valve closed
3/15/2010	10:08:46 AM	SiCl4 post valve closed
3/15/2010	10:08:46 AM	Main Vac valve closed
3/15/2010	10:08:46 AM	Bypass valve closed
3/15/2010	10:08:46 AM	Bubbler valve closed
3/15/2010	10:08:46 AM	Helium valve opened
3/15/2010	10:08:46 AM	Helium MFC set to  500.000000
3/15/2010	10:08:46 AM	H2 MFC set to  0.000000
3/15/2010	10:08:46 AM	BCl3 MFC set to  0.000000
3/15/2010	10:08:46 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:08:46 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:08:46 AM	Tube furnace set to 0
3/15/2010	10:10:07 AM	Helium valve closed
3/15/2010	10:10:07 AM	H2 valve closed
3/15/2010	10:10:07 AM	BCl3 valve closed
3/15/2010	10:10:07 AM	PH3 valve closed
3/15/2010	10:10:07 AM	SiCl4 pre valve closed
3/15/2010	10:10:07 AM	SiCl4 post valve closed
3/15/2010	10:10:07 AM	Main Vac valve closed
3/15/2010	10:10:07 AM	Bypass valve closed
3/15/2010	10:10:07 AM	Bubbler valve closed
3/15/2010	10:10:07 AM	Helium MFC set to  0.000000
3/15/2010	10:10:07 AM	H2 MFC set to  0.000000
3/15/2010	10:10:07 AM	BCl3 MFC set to  0.000000
3/15/2010	10:10:07 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:10:07 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:10:07 AM	Tube furnace set to 0
3/15/2010	10:10:07 AM	Run finished at 10:10 AM
3/15/2010	10:10:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	10:17:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	10:17:36 AM	Recipe started at 10:17 AM
3/15/2010	10:17:36 AM	Helium valve closed
3/15/2010	10:17:36 AM	H2 valve closed
3/15/2010	10:17:36 AM	BCl3 valve closed
3/15/2010	10:17:36 AM	PH3 valve closed
3/15/2010	10:17:36 AM	SiCl4 pre valve closed
3/15/2010	10:17:36 AM	SiCl4 post valve closed
3/15/2010	10:17:36 AM	Main Vac valve closed
3/15/2010	10:17:36 AM	Bubbler valve closed
3/15/2010	10:17:36 AM	Bypass valve opened
3/15/2010	10:17:36 AM	Helium MFC set to  0.000000
3/15/2010	10:17:36 AM	H2 MFC set to  0.000000
3/15/2010	10:17:36 AM	BCl3 MFC set to  0.000000
3/15/2010	10:17:36 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:17:36 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:17:36 AM	Tube furnace set to 0
3/15/2010	10:18:07 AM	Helium valve closed
3/15/2010	10:18:07 AM	H2 valve closed
3/15/2010	10:18:07 AM	BCl3 valve closed
3/15/2010	10:18:07 AM	PH3 valve closed
3/15/2010	10:18:07 AM	SiCl4 pre valve closed
3/15/2010	10:18:07 AM	SiCl4 post valve closed
3/15/2010	10:18:07 AM	Bubbler valve closed
3/15/2010	10:18:07 AM	Main Vac valve opened
3/15/2010	10:18:07 AM	Bypass valve opened
3/15/2010	10:18:07 AM	Helium MFC set to  0.000000
3/15/2010	10:18:07 AM	H2 MFC set to  0.000000
3/15/2010	10:18:07 AM	BCl3 MFC set to  0.000000
3/15/2010	10:18:07 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:18:07 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:18:07 AM	Tube furnace set to 0
3/15/2010	10:18:07 AM	Run finished at 10:18 AM
3/15/2010	10:18:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	10:18:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/15/2010	10:18:51 AM	Recipe started at 10:18 AM
3/15/2010	10:18:51 AM	H2 valve closed
3/15/2010	10:18:51 AM	BCl3 valve closed
3/15/2010	10:18:51 AM	PH3 valve closed
3/15/2010	10:18:51 AM	SiCl4 pre valve closed
3/15/2010	10:18:51 AM	SiCl4 post valve closed
3/15/2010	10:18:51 AM	Main Vac valve closed
3/15/2010	10:18:51 AM	Bypass valve closed
3/15/2010	10:18:51 AM	Bubbler valve closed
3/15/2010	10:18:51 AM	Helium valve opened
3/15/2010	10:18:51 AM	Helium MFC set to  500.000000
3/15/2010	10:18:51 AM	H2 MFC set to  0.000000
3/15/2010	10:18:51 AM	BCl3 MFC set to  0.000000
3/15/2010	10:18:51 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:18:51 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:18:51 AM	Tube furnace set to 0
3/15/2010	10:20:15 AM	Helium valve closed
3/15/2010	10:20:15 AM	H2 valve closed
3/15/2010	10:20:15 AM	BCl3 valve closed
3/15/2010	10:20:15 AM	PH3 valve closed
3/15/2010	10:20:15 AM	SiCl4 pre valve closed
3/15/2010	10:20:15 AM	SiCl4 post valve closed
3/15/2010	10:20:15 AM	Main Vac valve closed
3/15/2010	10:20:15 AM	Bypass valve closed
3/15/2010	10:20:15 AM	Bubbler valve closed
3/15/2010	10:20:15 AM	Helium MFC set to  0.000000
3/15/2010	10:20:15 AM	H2 MFC set to  0.000000
3/15/2010	10:20:15 AM	BCl3 MFC set to  0.000000
3/15/2010	10:20:15 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:20:15 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:20:15 AM	Tube furnace set to 0
3/15/2010	10:20:30 AM	Helium valve closed
3/15/2010	10:20:30 AM	H2 valve closed
3/15/2010	10:20:30 AM	BCl3 valve closed
3/15/2010	10:20:30 AM	PH3 valve closed
3/15/2010	10:20:30 AM	SiCl4 pre valve closed
3/15/2010	10:20:30 AM	SiCl4 post valve closed
3/15/2010	10:20:30 AM	Main Vac valve closed
3/15/2010	10:20:30 AM	Bubbler valve closed
3/15/2010	10:20:30 AM	Bypass valve opened
3/15/2010	10:20:30 AM	Helium MFC set to  0.000000
3/15/2010	10:20:30 AM	H2 MFC set to  0.000000
3/15/2010	10:20:30 AM	BCl3 MFC set to  0.000000
3/15/2010	10:20:30 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:20:30 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:20:30 AM	Tube furnace set to 0
3/15/2010	10:20:52 AM	Helium valve closed
3/15/2010	10:20:52 AM	H2 valve closed
3/15/2010	10:20:52 AM	BCl3 valve closed
3/15/2010	10:20:52 AM	PH3 valve closed
3/15/2010	10:20:52 AM	SiCl4 pre valve closed
3/15/2010	10:20:52 AM	SiCl4 post valve closed
3/15/2010	10:20:52 AM	Bubbler valve closed
3/15/2010	10:20:52 AM	Main Vac valve opened
3/15/2010	10:20:52 AM	Bypass valve opened
3/15/2010	10:20:52 AM	Helium MFC set to  0.000000
3/15/2010	10:20:52 AM	H2 MFC set to  0.000000
3/15/2010	10:20:52 AM	BCl3 MFC set to  0.000000
3/15/2010	10:20:52 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:20:52 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:20:52 AM	Tube furnace set to 0
3/15/2010	10:25:52 AM	H2 valve closed
3/15/2010	10:25:52 AM	BCl3 valve closed
3/15/2010	10:25:52 AM	PH3 valve closed
3/15/2010	10:25:52 AM	SiCl4 pre valve closed
3/15/2010	10:25:52 AM	SiCl4 post valve closed
3/15/2010	10:25:52 AM	Main Vac valve closed
3/15/2010	10:25:52 AM	Bypass valve closed
3/15/2010	10:25:52 AM	Bubbler valve closed
3/15/2010	10:25:52 AM	Helium valve opened
3/15/2010	10:25:52 AM	Helium MFC set to  500.000000
3/15/2010	10:25:52 AM	H2 MFC set to  0.000000
3/15/2010	10:25:53 AM	BCl3 MFC set to  0.000000
3/15/2010	10:25:53 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:25:53 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:25:53 AM	Tube furnace set to 0
3/15/2010	10:27:16 AM	Helium valve closed
3/15/2010	10:27:16 AM	H2 valve closed
3/15/2010	10:27:16 AM	BCl3 valve closed
3/15/2010	10:27:16 AM	PH3 valve closed
3/15/2010	10:27:16 AM	SiCl4 pre valve closed
3/15/2010	10:27:16 AM	SiCl4 post valve closed
3/15/2010	10:27:16 AM	Main Vac valve closed
3/15/2010	10:27:16 AM	Bypass valve closed
3/15/2010	10:27:16 AM	Bubbler valve closed
3/15/2010	10:27:16 AM	Helium MFC set to  0.000000
3/15/2010	10:27:16 AM	H2 MFC set to  0.000000
3/15/2010	10:27:16 AM	BCl3 MFC set to  0.000000
3/15/2010	10:27:16 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:27:16 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:27:16 AM	Tube furnace set to 0
3/15/2010	10:27:31 AM	Helium valve closed
3/15/2010	10:27:31 AM	H2 valve closed
3/15/2010	10:27:31 AM	BCl3 valve closed
3/15/2010	10:27:31 AM	PH3 valve closed
3/15/2010	10:27:31 AM	SiCl4 pre valve closed
3/15/2010	10:27:31 AM	SiCl4 post valve closed
3/15/2010	10:27:31 AM	Main Vac valve closed
3/15/2010	10:27:31 AM	Bubbler valve closed
3/15/2010	10:27:31 AM	Bypass valve opened
3/15/2010	10:27:31 AM	Helium MFC set to  0.000000
3/15/2010	10:27:31 AM	H2 MFC set to  0.000000
3/15/2010	10:27:31 AM	BCl3 MFC set to  0.000000
3/15/2010	10:27:31 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:27:31 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:27:31 AM	Tube furnace set to 0
3/15/2010	10:27:54 AM	Helium valve closed
3/15/2010	10:27:54 AM	H2 valve closed
3/15/2010	10:27:54 AM	BCl3 valve closed
3/15/2010	10:27:54 AM	PH3 valve closed
3/15/2010	10:27:54 AM	SiCl4 pre valve closed
3/15/2010	10:27:54 AM	SiCl4 post valve closed
3/15/2010	10:27:54 AM	Bubbler valve closed
3/15/2010	10:27:54 AM	Main Vac valve opened
3/15/2010	10:27:54 AM	Bypass valve opened
3/15/2010	10:27:54 AM	Helium MFC set to  0.000000
3/15/2010	10:27:54 AM	H2 MFC set to  0.000000
3/15/2010	10:27:54 AM	BCl3 MFC set to  0.000000
3/15/2010	10:27:54 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:27:54 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:27:54 AM	Tube furnace set to 0
3/15/2010	10:32:54 AM	H2 valve closed
3/15/2010	10:32:54 AM	BCl3 valve closed
3/15/2010	10:32:54 AM	PH3 valve closed
3/15/2010	10:32:54 AM	SiCl4 pre valve closed
3/15/2010	10:32:54 AM	SiCl4 post valve closed
3/15/2010	10:32:54 AM	Main Vac valve closed
3/15/2010	10:32:54 AM	Bypass valve closed
3/15/2010	10:32:54 AM	Bubbler valve closed
3/15/2010	10:32:54 AM	Helium valve opened
3/15/2010	10:32:54 AM	Helium MFC set to  500.000000
3/15/2010	10:32:54 AM	H2 MFC set to  0.000000
3/15/2010	10:32:54 AM	BCl3 MFC set to  0.000000
3/15/2010	10:32:54 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:32:54 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:32:54 AM	Tube furnace set to 0
3/15/2010	10:34:17 AM	Helium valve closed
3/15/2010	10:34:17 AM	H2 valve closed
3/15/2010	10:34:17 AM	BCl3 valve closed
3/15/2010	10:34:17 AM	PH3 valve closed
3/15/2010	10:34:17 AM	SiCl4 pre valve closed
3/15/2010	10:34:17 AM	SiCl4 post valve closed
3/15/2010	10:34:17 AM	Main Vac valve closed
3/15/2010	10:34:17 AM	Bypass valve closed
3/15/2010	10:34:17 AM	Bubbler valve closed
3/15/2010	10:34:17 AM	Helium MFC set to  0.000000
3/15/2010	10:34:17 AM	H2 MFC set to  0.000000
3/15/2010	10:34:17 AM	BCl3 MFC set to  0.000000
3/15/2010	10:34:17 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:34:17 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:34:17 AM	Tube furnace set to 0
3/15/2010	10:34:33 AM	Helium valve closed
3/15/2010	10:34:33 AM	H2 valve closed
3/15/2010	10:34:33 AM	BCl3 valve closed
3/15/2010	10:34:33 AM	PH3 valve closed
3/15/2010	10:34:33 AM	SiCl4 pre valve closed
3/15/2010	10:34:33 AM	SiCl4 post valve closed
3/15/2010	10:34:33 AM	Main Vac valve closed
3/15/2010	10:34:33 AM	Bubbler valve closed
3/15/2010	10:34:33 AM	Bypass valve opened
3/15/2010	10:34:33 AM	Helium MFC set to  0.000000
3/15/2010	10:34:33 AM	H2 MFC set to  0.000000
3/15/2010	10:34:33 AM	BCl3 MFC set to  0.000000
3/15/2010	10:34:33 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:34:33 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:34:33 AM	Tube furnace set to 0
3/15/2010	10:34:55 AM	Helium valve closed
3/15/2010	10:34:55 AM	H2 valve closed
3/15/2010	10:34:55 AM	BCl3 valve closed
3/15/2010	10:34:55 AM	PH3 valve closed
3/15/2010	10:34:55 AM	SiCl4 pre valve closed
3/15/2010	10:34:55 AM	SiCl4 post valve closed
3/15/2010	10:34:55 AM	Bubbler valve closed
3/15/2010	10:34:55 AM	Main Vac valve opened
3/15/2010	10:34:55 AM	Bypass valve opened
3/15/2010	10:34:55 AM	Helium MFC set to  0.000000
3/15/2010	10:34:55 AM	H2 MFC set to  0.000000
3/15/2010	10:34:55 AM	BCl3 MFC set to  0.000000
3/15/2010	10:34:55 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:34:55 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:34:55 AM	Tube furnace set to 0
3/15/2010	10:39:55 AM	Helium valve closed
3/15/2010	10:39:55 AM	H2 valve closed
3/15/2010	10:39:55 AM	BCl3 valve closed
3/15/2010	10:39:55 AM	PH3 valve closed
3/15/2010	10:39:55 AM	SiCl4 pre valve closed
3/15/2010	10:39:55 AM	SiCl4 post valve closed
3/15/2010	10:39:55 AM	Bubbler valve closed
3/15/2010	10:39:55 AM	Main Vac valve opened
3/15/2010	10:39:55 AM	Bypass valve opened
3/15/2010	10:39:55 AM	Helium MFC set to  0.000000
3/15/2010	10:39:55 AM	H2 MFC set to  0.000000
3/15/2010	10:39:55 AM	BCl3 MFC set to  0.000000
3/15/2010	10:39:55 AM	SiCl4 MFC set to  0.000000
3/15/2010	10:39:55 AM	Bypass solenoid MFC set to  0.000000
3/15/2010	10:39:55 AM	Tube furnace set to 0
3/15/2010	10:39:57 AM	Run finished at 10:39 AM
3/15/2010	10:39:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/15/2010	1:27:31 PM	Bypass valve closed
3/15/2010	1:27:32 PM	Main Vac valve closed
3/15/2010	1:27:45 PM	Bypass valve opened
3/15/2010	1:27:46 PM	Main Vac valve opened
3/15/2010	1:30:30 PM	Recipe started at 1:30 PM
3/15/2010	1:30:30 PM	Helium valve closed
3/15/2010	1:30:30 PM	BCl3 valve closed
3/15/2010	1:30:30 PM	PH3 valve closed
3/15/2010	1:30:30 PM	SiCl4 pre valve closed
3/15/2010	1:30:30 PM	SiCl4 post valve closed
3/15/2010	1:30:30 PM	Main Vac valve closed
3/15/2010	1:30:30 PM	Bypass valve closed
3/15/2010	1:30:30 PM	Bubbler valve closed
3/15/2010	1:30:30 PM	H2 valve opened
3/15/2010	1:30:30 PM	Helium MFC set to  0.000000
3/15/2010	1:30:30 PM	H2 MFC set to  500.000000
3/15/2010	1:30:30 PM	BCl3 MFC set to  0.000000
3/15/2010	1:30:30 PM	SiCl4 MFC set to  0.000000
3/15/2010	1:30:30 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	1:30:30 PM	Tube furnace set to 0
3/15/2010	1:31:53 PM	Helium valve closed
3/15/2010	1:31:53 PM	BCl3 valve closed
3/15/2010	1:31:53 PM	PH3 valve closed
3/15/2010	1:31:53 PM	SiCl4 pre valve closed
3/15/2010	1:31:53 PM	SiCl4 post valve closed
3/15/2010	1:31:53 PM	Main Vac valve closed
3/15/2010	1:31:53 PM	Bypass valve closed
3/15/2010	1:31:53 PM	H2 valve opened
3/15/2010	1:31:53 PM	Bubbler valve opened
3/15/2010	1:31:53 PM	Helium MFC set to  0.000000
3/15/2010	1:31:53 PM	H2 MFC set to  500.000000
3/15/2010	1:31:53 PM	BCl3 MFC set to  0.000000
3/15/2010	1:31:53 PM	SiCl4 MFC set to  0.000000
3/15/2010	1:31:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	1:31:53 PM	Tube furnace set to 0
3/15/2010	1:40:01 PM	Helium valve closed
3/15/2010	1:40:01 PM	PH3 valve closed
3/15/2010	1:40:01 PM	Main Vac valve closed
3/15/2010	1:40:01 PM	Bypass valve closed
3/15/2010	1:40:01 PM	H2 valve opened
3/15/2010	1:40:01 PM	BCl3 valve opened
3/15/2010	1:40:01 PM	SiCl4 pre valve opened
3/15/2010	1:40:01 PM	SiCl4 post valve opened
3/15/2010	1:40:01 PM	Bubbler valve opened
3/15/2010	1:40:01 PM	Helium MFC set to  0.000000
3/15/2010	1:40:01 PM	H2 MFC set to  500.000000
3/15/2010	1:40:01 PM	BCl3 MFC set to  35.000000
3/15/2010	1:40:01 PM	SiCl4 MFC set to  325.000000
3/15/2010	1:40:01 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	1:40:01 PM	Tube furnace set to 0
3/15/2010	1:45:01 PM	H2 valve closed
3/15/2010	1:45:01 PM	BCl3 valve closed
3/15/2010	1:45:01 PM	PH3 valve closed
3/15/2010	1:45:01 PM	SiCl4 pre valve closed
3/15/2010	1:45:01 PM	SiCl4 post valve closed
3/15/2010	1:45:01 PM	Main Vac valve closed
3/15/2010	1:45:01 PM	Bypass valve closed
3/15/2010	1:45:01 PM	Helium valve opened
3/15/2010	1:45:01 PM	Bubbler valve opened
3/15/2010	1:45:01 PM	Helium MFC set to  500.000000
3/15/2010	1:45:01 PM	H2 MFC set to  0.000000
3/15/2010	1:45:01 PM	BCl3 MFC set to  0.000000
3/15/2010	1:45:01 PM	SiCl4 MFC set to  0.000000
3/15/2010	1:45:01 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	1:45:01 PM	Tube furnace set to 0
3/15/2010	2:05:01 PM	Helium valve closed
3/15/2010	2:05:01 PM	H2 valve closed
3/15/2010	2:05:01 PM	BCl3 valve closed
3/15/2010	2:05:01 PM	PH3 valve closed
3/15/2010	2:05:01 PM	SiCl4 pre valve closed
3/15/2010	2:05:01 PM	SiCl4 post valve closed
3/15/2010	2:05:01 PM	Main Vac valve closed
3/15/2010	2:05:01 PM	Bypass valve closed
3/15/2010	2:05:01 PM	Bubbler valve closed
3/15/2010	2:05:01 PM	Helium MFC set to  0.000000
3/15/2010	2:05:01 PM	H2 MFC set to  0.000000
3/15/2010	2:05:01 PM	BCl3 MFC set to  0.000000
3/15/2010	2:05:01 PM	SiCl4 MFC set to  0.000000
3/15/2010	2:05:01 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	2:05:01 PM	Tube furnace set to 0
3/15/2010	2:05:01 PM	Run finished at 2:05 PM
3/15/2010	2:11:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	2:11:06 PM	Recipe started at 2:11 PM
3/15/2010	2:11:06 PM	Helium valve closed
3/15/2010	2:11:06 PM	H2 valve closed
3/15/2010	2:11:06 PM	BCl3 valve closed
3/15/2010	2:11:06 PM	PH3 valve closed
3/15/2010	2:11:06 PM	SiCl4 pre valve closed
3/15/2010	2:11:06 PM	SiCl4 post valve closed
3/15/2010	2:11:06 PM	Main Vac valve closed
3/15/2010	2:11:06 PM	Bubbler valve closed
3/15/2010	2:11:06 PM	Bypass valve opened
3/15/2010	2:11:06 PM	Helium MFC set to  0.000000
3/15/2010	2:11:06 PM	H2 MFC set to  0.000000
3/15/2010	2:11:06 PM	BCl3 MFC set to  0.000000
3/15/2010	2:11:06 PM	SiCl4 MFC set to  0.000000
3/15/2010	2:11:06 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	2:11:06 PM	Tube furnace set to 0
3/15/2010	2:11:37 PM	Helium valve closed
3/15/2010	2:11:37 PM	H2 valve closed
3/15/2010	2:11:37 PM	BCl3 valve closed
3/15/2010	2:11:37 PM	PH3 valve closed
3/15/2010	2:11:37 PM	SiCl4 pre valve closed
3/15/2010	2:11:37 PM	SiCl4 post valve closed
3/15/2010	2:11:37 PM	Bubbler valve closed
3/15/2010	2:11:37 PM	Main Vac valve opened
3/15/2010	2:11:37 PM	Bypass valve opened
3/15/2010	2:11:37 PM	Helium MFC set to  0.000000
3/15/2010	2:11:37 PM	H2 MFC set to  0.000000
3/15/2010	2:11:37 PM	BCl3 MFC set to  0.000000
3/15/2010	2:11:37 PM	SiCl4 MFC set to  0.000000
3/15/2010	2:11:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	2:11:37 PM	Tube furnace set to 0
3/15/2010	2:11:37 PM	Run finished at 2:11 PM
3/15/2010	2:11:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:26:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:26:32 PM	Recipe started at 4:26 PM
3/15/2010	4:26:32 PM	H2 valve closed
3/15/2010	4:26:32 PM	BCl3 valve closed
3/15/2010	4:26:32 PM	PH3 valve closed
3/15/2010	4:26:32 PM	SiCl4 pre valve closed
3/15/2010	4:26:32 PM	SiCl4 post valve closed
3/15/2010	4:26:32 PM	Main Vac valve closed
3/15/2010	4:26:32 PM	Bypass valve closed
3/15/2010	4:26:32 PM	Bubbler valve closed
3/15/2010	4:26:32 PM	Helium valve opened
3/15/2010	4:26:32 PM	Helium MFC set to  500.000000
3/15/2010	4:26:32 PM	H2 MFC set to  0.000000
3/15/2010	4:26:32 PM	BCl3 MFC set to  0.000000
3/15/2010	4:26:32 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:26:32 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:26:32 PM	Tube furnace set to 0
3/15/2010	4:27:53 PM	Helium valve closed
3/15/2010	4:27:53 PM	H2 valve closed
3/15/2010	4:27:53 PM	BCl3 valve closed
3/15/2010	4:27:53 PM	PH3 valve closed
3/15/2010	4:27:53 PM	SiCl4 pre valve closed
3/15/2010	4:27:53 PM	SiCl4 post valve closed
3/15/2010	4:27:53 PM	Main Vac valve closed
3/15/2010	4:27:53 PM	Bypass valve closed
3/15/2010	4:27:53 PM	Bubbler valve closed
3/15/2010	4:27:53 PM	Helium MFC set to  0.000000
3/15/2010	4:27:53 PM	H2 MFC set to  0.000000
3/15/2010	4:27:53 PM	BCl3 MFC set to  0.000000
3/15/2010	4:27:53 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:27:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:27:53 PM	Tube furnace set to 0
3/15/2010	4:27:53 PM	Run finished at 4:27 PM
3/15/2010	4:27:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:30:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:30:05 PM	Recipe started at 4:30 PM
3/15/2010	4:30:05 PM	H2 valve closed
3/15/2010	4:30:05 PM	BCl3 valve closed
3/15/2010	4:30:05 PM	PH3 valve closed
3/15/2010	4:30:05 PM	SiCl4 pre valve closed
3/15/2010	4:30:05 PM	SiCl4 post valve closed
3/15/2010	4:30:05 PM	Main Vac valve closed
3/15/2010	4:30:05 PM	Bypass valve closed
3/15/2010	4:30:05 PM	Bubbler valve closed
3/15/2010	4:30:05 PM	Helium valve opened
3/15/2010	4:30:05 PM	Helium MFC set to  500.000000
3/15/2010	4:30:05 PM	H2 MFC set to  0.000000
3/15/2010	4:30:05 PM	BCl3 MFC set to  0.000000
3/15/2010	4:30:05 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:30:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:30:05 PM	Tube furnace set to 0
3/15/2010	4:30:05 PM	Helium valve closed
3/15/2010	4:30:05 PM	H2 valve closed
3/15/2010	4:30:05 PM	BCl3 valve closed
3/15/2010	4:30:05 PM	PH3 valve closed
3/15/2010	4:30:05 PM	SiCl4 pre valve closed
3/15/2010	4:30:05 PM	SiCl4 post valve closed
3/15/2010	4:30:05 PM	Main Vac valve closed
3/15/2010	4:30:05 PM	Bypass valve closed
3/15/2010	4:30:05 PM	Bubbler valve closed
3/15/2010	4:30:05 PM	Helium MFC set to  0.000000
3/15/2010	4:30:05 PM	H2 MFC set to  0.000000
3/15/2010	4:30:05 PM	BCl3 MFC set to  0.000000
3/15/2010	4:30:05 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:30:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:30:05 PM	Tube furnace set to 0
3/15/2010	4:30:05 PM	Run finished at 4:30 PM
3/15/2010	4:30:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:30:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:30:09 PM	Recipe started at 4:30 PM
3/15/2010	4:30:09 PM	Helium valve closed
3/15/2010	4:30:09 PM	H2 valve closed
3/15/2010	4:30:09 PM	BCl3 valve closed
3/15/2010	4:30:09 PM	PH3 valve closed
3/15/2010	4:30:09 PM	SiCl4 pre valve closed
3/15/2010	4:30:09 PM	SiCl4 post valve closed
3/15/2010	4:30:09 PM	Main Vac valve closed
3/15/2010	4:30:09 PM	Bubbler valve closed
3/15/2010	4:30:09 PM	Bypass valve opened
3/15/2010	4:30:09 PM	Helium MFC set to  0.000000
3/15/2010	4:30:09 PM	H2 MFC set to  0.000000
3/15/2010	4:30:09 PM	BCl3 MFC set to  0.000000
3/15/2010	4:30:09 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:30:09 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:30:09 PM	Tube furnace set to 0
3/15/2010	4:30:40 PM	Helium valve closed
3/15/2010	4:30:40 PM	H2 valve closed
3/15/2010	4:30:40 PM	BCl3 valve closed
3/15/2010	4:30:40 PM	PH3 valve closed
3/15/2010	4:30:40 PM	SiCl4 pre valve closed
3/15/2010	4:30:40 PM	SiCl4 post valve closed
3/15/2010	4:30:40 PM	Bubbler valve closed
3/15/2010	4:30:40 PM	Main Vac valve opened
3/15/2010	4:30:40 PM	Bypass valve opened
3/15/2010	4:30:40 PM	Helium MFC set to  0.000000
3/15/2010	4:30:40 PM	H2 MFC set to  0.000000
3/15/2010	4:30:40 PM	BCl3 MFC set to  0.000000
3/15/2010	4:30:40 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:30:40 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:30:40 PM	Tube furnace set to 0
3/15/2010	4:30:40 PM	Run finished at 4:30 PM
3/15/2010	4:30:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:32:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:32:17 PM	Recipe started at 4:32 PM
3/15/2010	4:32:17 PM	H2 valve closed
3/15/2010	4:32:17 PM	BCl3 valve closed
3/15/2010	4:32:17 PM	PH3 valve closed
3/15/2010	4:32:17 PM	SiCl4 pre valve closed
3/15/2010	4:32:17 PM	SiCl4 post valve closed
3/15/2010	4:32:17 PM	Main Vac valve closed
3/15/2010	4:32:17 PM	Bypass valve closed
3/15/2010	4:32:17 PM	Bubbler valve closed
3/15/2010	4:32:17 PM	Helium valve opened
3/15/2010	4:32:17 PM	Helium MFC set to  500.000000
3/15/2010	4:32:17 PM	H2 MFC set to  0.000000
3/15/2010	4:32:17 PM	BCl3 MFC set to  0.000000
3/15/2010	4:32:17 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:32:17 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:32:17 PM	Tube furnace set to 0
3/15/2010	4:33:38 PM	Helium valve closed
3/15/2010	4:33:38 PM	H2 valve closed
3/15/2010	4:33:38 PM	BCl3 valve closed
3/15/2010	4:33:38 PM	PH3 valve closed
3/15/2010	4:33:38 PM	SiCl4 pre valve closed
3/15/2010	4:33:38 PM	SiCl4 post valve closed
3/15/2010	4:33:38 PM	Main Vac valve closed
3/15/2010	4:33:38 PM	Bypass valve closed
3/15/2010	4:33:38 PM	Bubbler valve closed
3/15/2010	4:33:38 PM	Helium MFC set to  0.000000
3/15/2010	4:33:38 PM	H2 MFC set to  0.000000
3/15/2010	4:33:38 PM	BCl3 MFC set to  0.000000
3/15/2010	4:33:38 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:33:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:33:38 PM	Tube furnace set to 0
3/15/2010	4:33:39 PM	Run finished at 4:33 PM
3/15/2010	4:33:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:34:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:34:05 PM	Recipe started at 4:34 PM
3/15/2010	4:34:05 PM	Helium valve closed
3/15/2010	4:34:05 PM	H2 valve closed
3/15/2010	4:34:05 PM	BCl3 valve closed
3/15/2010	4:34:05 PM	PH3 valve closed
3/15/2010	4:34:05 PM	SiCl4 pre valve closed
3/15/2010	4:34:05 PM	SiCl4 post valve closed
3/15/2010	4:34:05 PM	Main Vac valve closed
3/15/2010	4:34:05 PM	Bubbler valve closed
3/15/2010	4:34:05 PM	Bypass valve opened
3/15/2010	4:34:05 PM	Helium MFC set to  0.000000
3/15/2010	4:34:05 PM	H2 MFC set to  0.000000
3/15/2010	4:34:05 PM	BCl3 MFC set to  0.000000
3/15/2010	4:34:05 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:34:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:34:05 PM	Tube furnace set to 0
3/15/2010	4:34:27 PM	Helium valve closed
3/15/2010	4:34:27 PM	H2 valve closed
3/15/2010	4:34:27 PM	BCl3 valve closed
3/15/2010	4:34:27 PM	PH3 valve closed
3/15/2010	4:34:27 PM	SiCl4 pre valve closed
3/15/2010	4:34:27 PM	SiCl4 post valve closed
3/15/2010	4:34:27 PM	Bubbler valve closed
3/15/2010	4:34:27 PM	Main Vac valve opened
3/15/2010	4:34:27 PM	Bypass valve opened
3/15/2010	4:34:27 PM	Helium MFC set to  0.000000
3/15/2010	4:34:27 PM	H2 MFC set to  0.000000
3/15/2010	4:34:27 PM	BCl3 MFC set to  0.000000
3/15/2010	4:34:27 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:34:27 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:34:27 PM	Tube furnace set to 0
3/15/2010	4:34:27 PM	Run finished at 4:34 PM
3/15/2010	4:34:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:34:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:34:30 PM	Recipe started at 4:34 PM
3/15/2010	4:34:30 PM	H2 valve closed
3/15/2010	4:34:30 PM	BCl3 valve closed
3/15/2010	4:34:30 PM	PH3 valve closed
3/15/2010	4:34:30 PM	SiCl4 pre valve closed
3/15/2010	4:34:30 PM	SiCl4 post valve closed
3/15/2010	4:34:30 PM	Main Vac valve closed
3/15/2010	4:34:30 PM	Bypass valve closed
3/15/2010	4:34:30 PM	Bubbler valve closed
3/15/2010	4:34:30 PM	Helium valve opened
3/15/2010	4:34:30 PM	Helium MFC set to  500.000000
3/15/2010	4:34:30 PM	H2 MFC set to  0.000000
3/15/2010	4:34:30 PM	BCl3 MFC set to  0.000000
3/15/2010	4:34:30 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:34:30 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:34:30 PM	Tube furnace set to 0
3/15/2010	4:35:51 PM	Helium valve closed
3/15/2010	4:35:51 PM	H2 valve closed
3/15/2010	4:35:51 PM	BCl3 valve closed
3/15/2010	4:35:51 PM	PH3 valve closed
3/15/2010	4:35:51 PM	SiCl4 pre valve closed
3/15/2010	4:35:51 PM	SiCl4 post valve closed
3/15/2010	4:35:51 PM	Main Vac valve closed
3/15/2010	4:35:51 PM	Bypass valve closed
3/15/2010	4:35:51 PM	Bubbler valve closed
3/15/2010	4:35:51 PM	Helium MFC set to  0.000000
3/15/2010	4:35:51 PM	H2 MFC set to  0.000000
3/15/2010	4:35:51 PM	BCl3 MFC set to  0.000000
3/15/2010	4:35:51 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:35:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:35:51 PM	Tube furnace set to 0
3/15/2010	4:35:51 PM	Run finished at 4:35 PM
3/15/2010	4:35:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:38:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:38:17 PM	Recipe started at 4:38 PM
3/15/2010	4:38:17 PM	Helium valve closed
3/15/2010	4:38:17 PM	H2 valve closed
3/15/2010	4:38:17 PM	BCl3 valve closed
3/15/2010	4:38:17 PM	PH3 valve closed
3/15/2010	4:38:17 PM	SiCl4 pre valve closed
3/15/2010	4:38:17 PM	SiCl4 post valve closed
3/15/2010	4:38:17 PM	Main Vac valve closed
3/15/2010	4:38:17 PM	Bubbler valve closed
3/15/2010	4:38:17 PM	Bypass valve opened
3/15/2010	4:38:17 PM	Helium MFC set to  0.000000
3/15/2010	4:38:17 PM	H2 MFC set to  0.000000
3/15/2010	4:38:17 PM	BCl3 MFC set to  0.000000
3/15/2010	4:38:17 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:38:17 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:38:17 PM	Tube furnace set to 0
3/15/2010	4:38:47 PM	Helium valve closed
3/15/2010	4:38:47 PM	H2 valve closed
3/15/2010	4:38:47 PM	BCl3 valve closed
3/15/2010	4:38:47 PM	PH3 valve closed
3/15/2010	4:38:47 PM	SiCl4 pre valve closed
3/15/2010	4:38:47 PM	SiCl4 post valve closed
3/15/2010	4:38:47 PM	Bubbler valve closed
3/15/2010	4:38:47 PM	Main Vac valve opened
3/15/2010	4:38:47 PM	Bypass valve opened
3/15/2010	4:38:47 PM	Helium MFC set to  0.000000
3/15/2010	4:38:47 PM	H2 MFC set to  0.000000
3/15/2010	4:38:47 PM	BCl3 MFC set to  0.000000
3/15/2010	4:38:47 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:38:47 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:38:47 PM	Tube furnace set to 0
3/15/2010	4:38:48 PM	Run finished at 4:38 PM
3/15/2010	4:38:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:42:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:42:42 PM	Recipe started at 4:42 PM
3/15/2010	4:42:42 PM	H2 valve closed
3/15/2010	4:42:42 PM	BCl3 valve closed
3/15/2010	4:42:42 PM	PH3 valve closed
3/15/2010	4:42:42 PM	SiCl4 pre valve closed
3/15/2010	4:42:42 PM	SiCl4 post valve closed
3/15/2010	4:42:42 PM	Main Vac valve closed
3/15/2010	4:42:42 PM	Bypass valve closed
3/15/2010	4:42:42 PM	Bubbler valve closed
3/15/2010	4:42:42 PM	Helium valve opened
3/15/2010	4:42:42 PM	Helium MFC set to  500.000000
3/15/2010	4:42:42 PM	H2 MFC set to  0.000000
3/15/2010	4:42:42 PM	BCl3 MFC set to  0.000000
3/15/2010	4:42:42 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:42:42 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:42:42 PM	Tube furnace set to 0
3/15/2010	4:43:59 PM	Helium valve closed
3/15/2010	4:43:59 PM	H2 valve closed
3/15/2010	4:43:59 PM	BCl3 valve closed
3/15/2010	4:43:59 PM	PH3 valve closed
3/15/2010	4:43:59 PM	SiCl4 pre valve closed
3/15/2010	4:43:59 PM	SiCl4 post valve closed
3/15/2010	4:43:59 PM	Main Vac valve closed
3/15/2010	4:43:59 PM	Bypass valve closed
3/15/2010	4:43:59 PM	Bubbler valve closed
3/15/2010	4:43:59 PM	Helium MFC set to  0.000000
3/15/2010	4:43:59 PM	H2 MFC set to  0.000000
3/15/2010	4:43:59 PM	BCl3 MFC set to  0.000000
3/15/2010	4:43:59 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:43:59 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:43:59 PM	Tube furnace set to 0
3/15/2010	4:43:59 PM	Run finished at 4:43 PM
3/15/2010	4:43:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	4:45:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:45:41 PM	Recipe started at 4:45 PM
3/15/2010	4:45:41 PM	Helium valve closed
3/15/2010	4:45:41 PM	H2 valve closed
3/15/2010	4:45:41 PM	BCl3 valve closed
3/15/2010	4:45:41 PM	PH3 valve closed
3/15/2010	4:45:41 PM	SiCl4 pre valve closed
3/15/2010	4:45:41 PM	SiCl4 post valve closed
3/15/2010	4:45:41 PM	Main Vac valve closed
3/15/2010	4:45:41 PM	Bubbler valve closed
3/15/2010	4:45:41 PM	Bypass valve opened
3/15/2010	4:45:41 PM	Helium MFC set to  0.000000
3/15/2010	4:45:41 PM	H2 MFC set to  0.000000
3/15/2010	4:45:41 PM	BCl3 MFC set to  0.000000
3/15/2010	4:45:41 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:45:41 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:45:41 PM	Tube furnace set to 0
3/15/2010	4:46:12 PM	Helium valve closed
3/15/2010	4:46:12 PM	H2 valve closed
3/15/2010	4:46:12 PM	BCl3 valve closed
3/15/2010	4:46:12 PM	PH3 valve closed
3/15/2010	4:46:12 PM	SiCl4 pre valve closed
3/15/2010	4:46:12 PM	SiCl4 post valve closed
3/15/2010	4:46:12 PM	Bubbler valve closed
3/15/2010	4:46:12 PM	Main Vac valve opened
3/15/2010	4:46:12 PM	Bypass valve opened
3/15/2010	4:46:12 PM	Helium MFC set to  0.000000
3/15/2010	4:46:12 PM	H2 MFC set to  0.000000
3/15/2010	4:46:12 PM	BCl3 MFC set to  0.000000
3/15/2010	4:46:12 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:46:12 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:46:12 PM	Tube furnace set to 0
3/15/2010	4:46:12 PM	Run finished at 4:46 PM
3/15/2010	4:46:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	4:46:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/15/2010	4:46:44 PM	Recipe started at 4:46 PM
3/15/2010	4:46:44 PM	H2 valve closed
3/15/2010	4:46:44 PM	BCl3 valve closed
3/15/2010	4:46:44 PM	PH3 valve closed
3/15/2010	4:46:44 PM	SiCl4 pre valve closed
3/15/2010	4:46:44 PM	SiCl4 post valve closed
3/15/2010	4:46:44 PM	Main Vac valve closed
3/15/2010	4:46:44 PM	Bypass valve closed
3/15/2010	4:46:44 PM	Bubbler valve closed
3/15/2010	4:46:44 PM	Helium valve opened
3/15/2010	4:46:44 PM	Helium MFC set to  500.000000
3/15/2010	4:46:44 PM	H2 MFC set to  0.000000
3/15/2010	4:46:44 PM	BCl3 MFC set to  0.000000
3/15/2010	4:46:44 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:46:44 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:46:44 PM	Tube furnace set to 0
3/15/2010	4:48:07 PM	Helium valve closed
3/15/2010	4:48:07 PM	H2 valve closed
3/15/2010	4:48:07 PM	BCl3 valve closed
3/15/2010	4:48:07 PM	PH3 valve closed
3/15/2010	4:48:07 PM	SiCl4 pre valve closed
3/15/2010	4:48:07 PM	SiCl4 post valve closed
3/15/2010	4:48:07 PM	Main Vac valve closed
3/15/2010	4:48:07 PM	Bypass valve closed
3/15/2010	4:48:07 PM	Bubbler valve closed
3/15/2010	4:48:07 PM	Helium MFC set to  0.000000
3/15/2010	4:48:07 PM	H2 MFC set to  0.000000
3/15/2010	4:48:07 PM	BCl3 MFC set to  0.000000
3/15/2010	4:48:07 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:48:07 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:48:07 PM	Tube furnace set to 0
3/15/2010	4:48:22 PM	Helium valve closed
3/15/2010	4:48:22 PM	H2 valve closed
3/15/2010	4:48:22 PM	BCl3 valve closed
3/15/2010	4:48:22 PM	PH3 valve closed
3/15/2010	4:48:22 PM	SiCl4 pre valve closed
3/15/2010	4:48:22 PM	SiCl4 post valve closed
3/15/2010	4:48:22 PM	Main Vac valve closed
3/15/2010	4:48:22 PM	Bubbler valve closed
3/15/2010	4:48:22 PM	Bypass valve opened
3/15/2010	4:48:22 PM	Helium MFC set to  0.000000
3/15/2010	4:48:22 PM	H2 MFC set to  0.000000
3/15/2010	4:48:22 PM	BCl3 MFC set to  0.000000
3/15/2010	4:48:22 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:48:22 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:48:22 PM	Tube furnace set to 0
3/15/2010	4:48:44 PM	Helium valve closed
3/15/2010	4:48:44 PM	H2 valve closed
3/15/2010	4:48:44 PM	BCl3 valve closed
3/15/2010	4:48:44 PM	PH3 valve closed
3/15/2010	4:48:44 PM	SiCl4 pre valve closed
3/15/2010	4:48:44 PM	SiCl4 post valve closed
3/15/2010	4:48:44 PM	Bubbler valve closed
3/15/2010	4:48:44 PM	Main Vac valve opened
3/15/2010	4:48:44 PM	Bypass valve opened
3/15/2010	4:48:44 PM	Helium MFC set to  0.000000
3/15/2010	4:48:44 PM	H2 MFC set to  0.000000
3/15/2010	4:48:44 PM	BCl3 MFC set to  0.000000
3/15/2010	4:48:45 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:48:45 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:48:45 PM	Tube furnace set to 0
3/15/2010	4:53:45 PM	H2 valve closed
3/15/2010	4:53:45 PM	BCl3 valve closed
3/15/2010	4:53:45 PM	PH3 valve closed
3/15/2010	4:53:45 PM	SiCl4 pre valve closed
3/15/2010	4:53:45 PM	SiCl4 post valve closed
3/15/2010	4:53:45 PM	Main Vac valve closed
3/15/2010	4:53:45 PM	Bypass valve closed
3/15/2010	4:53:45 PM	Bubbler valve closed
3/15/2010	4:53:45 PM	Helium valve opened
3/15/2010	4:53:45 PM	Helium MFC set to  500.000000
3/15/2010	4:53:45 PM	H2 MFC set to  0.000000
3/15/2010	4:53:45 PM	BCl3 MFC set to  0.000000
3/15/2010	4:53:45 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:53:45 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:53:45 PM	Tube furnace set to 0
3/15/2010	4:55:08 PM	Helium valve closed
3/15/2010	4:55:08 PM	H2 valve closed
3/15/2010	4:55:08 PM	BCl3 valve closed
3/15/2010	4:55:08 PM	PH3 valve closed
3/15/2010	4:55:08 PM	SiCl4 pre valve closed
3/15/2010	4:55:08 PM	SiCl4 post valve closed
3/15/2010	4:55:08 PM	Main Vac valve closed
3/15/2010	4:55:08 PM	Bypass valve closed
3/15/2010	4:55:08 PM	Bubbler valve closed
3/15/2010	4:55:08 PM	Helium MFC set to  0.000000
3/15/2010	4:55:08 PM	H2 MFC set to  0.000000
3/15/2010	4:55:08 PM	BCl3 MFC set to  0.000000
3/15/2010	4:55:08 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:55:08 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:55:08 PM	Tube furnace set to 0
3/15/2010	4:55:23 PM	Helium valve closed
3/15/2010	4:55:23 PM	H2 valve closed
3/15/2010	4:55:23 PM	BCl3 valve closed
3/15/2010	4:55:23 PM	PH3 valve closed
3/15/2010	4:55:23 PM	SiCl4 pre valve closed
3/15/2010	4:55:23 PM	SiCl4 post valve closed
3/15/2010	4:55:23 PM	Main Vac valve closed
3/15/2010	4:55:23 PM	Bubbler valve closed
3/15/2010	4:55:23 PM	Bypass valve opened
3/15/2010	4:55:23 PM	Helium MFC set to  0.000000
3/15/2010	4:55:23 PM	H2 MFC set to  0.000000
3/15/2010	4:55:23 PM	BCl3 MFC set to  0.000000
3/15/2010	4:55:23 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:55:23 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:55:23 PM	Tube furnace set to 0
3/15/2010	4:55:45 PM	Helium valve closed
3/15/2010	4:55:45 PM	H2 valve closed
3/15/2010	4:55:45 PM	BCl3 valve closed
3/15/2010	4:55:45 PM	PH3 valve closed
3/15/2010	4:55:45 PM	SiCl4 pre valve closed
3/15/2010	4:55:45 PM	SiCl4 post valve closed
3/15/2010	4:55:45 PM	Bubbler valve closed
3/15/2010	4:55:45 PM	Main Vac valve opened
3/15/2010	4:55:45 PM	Bypass valve opened
3/15/2010	4:55:45 PM	Helium MFC set to  0.000000
3/15/2010	4:55:45 PM	H2 MFC set to  0.000000
3/15/2010	4:55:45 PM	BCl3 MFC set to  0.000000
3/15/2010	4:55:45 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:55:45 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	4:55:45 PM	Tube furnace set to 0
3/15/2010	4:56:17 PM	Run aborted at 4:56 PM
3/15/2010	4:56:17 PM	Helium valve closed
3/15/2010	4:56:17 PM	H2 valve closed
3/15/2010	4:56:17 PM	BCl3 valve closed
3/15/2010	4:56:17 PM	PH3 valve closed
3/15/2010	4:56:17 PM	SiCl4 pre valve closed
3/15/2010	4:56:17 PM	SiCl4 post valve closed
3/15/2010	4:56:17 PM	Bypass valve closed
3/15/2010	4:56:17 PM	Main Vac valve closed
3/15/2010	4:56:17 PM	Bubbler valve closed
3/15/2010	4:56:17 PM	Helium MFC set to  0.000000
3/15/2010	4:56:17 PM	H2 MFC set to  0.000000
3/15/2010	4:56:17 PM	BCl3 MFC set to  0.000000
3/15/2010	4:56:17 PM	SiCl4 MFC set to  0.000000
3/15/2010	4:56:17 PM	Tube furnace set to 0
3/15/2010	4:56:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/15/2010	4:56:23 PM	Program exited cleanly
3/15/2010	5:19:46 PM	Program started normally
3/15/2010	5:19:47 PM	Helium valve closed
3/15/2010	5:19:47 PM	H2 valve closed
3/15/2010	5:19:47 PM	BCl3 valve closed
3/15/2010	5:19:47 PM	PH3 valve closed
3/15/2010	5:19:47 PM	SiCl4 pre valve closed
3/15/2010	5:19:47 PM	SiCl4 post valve closed
3/15/2010	5:19:47 PM	Main Vac valve closed
3/15/2010	5:19:47 PM	Bypass valve closed
3/15/2010	5:19:47 PM	Bubbler valve closed
3/15/2010	5:19:47 PM	Helium MFC set to  0.000000
3/15/2010	5:19:47 PM	H2 MFC set to  0.000000
3/15/2010	5:19:47 PM	BCl3 MFC set to  0.000000
3/15/2010	5:19:47 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:19:47 PM	Bypass solenoid MFC set to  760.000000
3/15/2010	5:19:47 PM	Tube furnace set to 0
3/15/2010	5:19:49 PM	Bypass valve opened
3/15/2010	5:19:49 PM	Main Vac valve opened
3/15/2010	5:20:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	5:20:47 PM	Recipe started at 5:20 PM
3/15/2010	5:20:47 PM	H2 valve closed
3/15/2010	5:20:47 PM	BCl3 valve closed
3/15/2010	5:20:47 PM	PH3 valve closed
3/15/2010	5:20:47 PM	SiCl4 pre valve closed
3/15/2010	5:20:47 PM	SiCl4 post valve closed
3/15/2010	5:20:47 PM	Main Vac valve closed
3/15/2010	5:20:47 PM	Bypass valve closed
3/15/2010	5:20:47 PM	Bubbler valve closed
3/15/2010	5:20:48 PM	Helium valve opened
3/15/2010	5:20:48 PM	Helium MFC set to  500.000000
3/15/2010	5:20:48 PM	H2 MFC set to  0.000000
3/15/2010	5:20:48 PM	BCl3 MFC set to  0.000000
3/15/2010	5:20:48 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:20:48 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:20:48 PM	Tube furnace set to 0
3/15/2010	5:22:04 PM	Helium valve closed
3/15/2010	5:22:04 PM	H2 valve closed
3/15/2010	5:22:04 PM	BCl3 valve closed
3/15/2010	5:22:04 PM	PH3 valve closed
3/15/2010	5:22:04 PM	SiCl4 pre valve closed
3/15/2010	5:22:04 PM	SiCl4 post valve closed
3/15/2010	5:22:04 PM	Main Vac valve closed
3/15/2010	5:22:04 PM	Bypass valve closed
3/15/2010	5:22:04 PM	Bubbler valve closed
3/15/2010	5:22:04 PM	Helium MFC set to  0.000000
3/15/2010	5:22:04 PM	H2 MFC set to  0.000000
3/15/2010	5:22:04 PM	BCl3 MFC set to  0.000000
3/15/2010	5:22:04 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:22:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:22:04 PM	Tube furnace set to 0
3/15/2010	5:22:05 PM	Run finished at 5:22 PM
3/15/2010	5:22:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2010	5:22:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	5:22:10 PM	Recipe started at 5:22 PM
3/15/2010	5:22:10 PM	Helium valve closed
3/15/2010	5:22:10 PM	H2 valve closed
3/15/2010	5:22:10 PM	BCl3 valve closed
3/15/2010	5:22:10 PM	PH3 valve closed
3/15/2010	5:22:10 PM	SiCl4 pre valve closed
3/15/2010	5:22:10 PM	SiCl4 post valve closed
3/15/2010	5:22:10 PM	Main Vac valve closed
3/15/2010	5:22:10 PM	Bubbler valve closed
3/15/2010	5:22:10 PM	Bypass valve opened
3/15/2010	5:22:10 PM	Helium MFC set to  0.000000
3/15/2010	5:22:10 PM	H2 MFC set to  0.000000
3/15/2010	5:22:10 PM	BCl3 MFC set to  0.000000
3/15/2010	5:22:10 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:22:10 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:22:10 PM	Tube furnace set to 0
3/15/2010	5:22:31 PM	Helium valve closed
3/15/2010	5:22:31 PM	H2 valve closed
3/15/2010	5:22:31 PM	BCl3 valve closed
3/15/2010	5:22:31 PM	PH3 valve closed
3/15/2010	5:22:31 PM	SiCl4 pre valve closed
3/15/2010	5:22:31 PM	SiCl4 post valve closed
3/15/2010	5:22:31 PM	Bubbler valve closed
3/15/2010	5:22:31 PM	Main Vac valve opened
3/15/2010	5:22:31 PM	Bypass valve opened
3/15/2010	5:22:31 PM	Helium MFC set to  0.000000
3/15/2010	5:22:31 PM	H2 MFC set to  0.000000
3/15/2010	5:22:31 PM	BCl3 MFC set to  0.000000
3/15/2010	5:22:31 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:22:31 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:22:31 PM	Tube furnace set to 0
3/15/2010	5:22:32 PM	Run finished at 5:22 PM
3/15/2010	5:22:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	5:23:46 PM	Bypass valve closed
3/15/2010	5:23:46 PM	Main Vac valve closed
3/15/2010	5:24:01 PM	Main Vac valve opened
3/15/2010	5:24:01 PM	Bypass valve opened
3/15/2010	5:24:59 PM	Recipe started at 5:24 PM
3/15/2010	5:24:59 PM	Helium valve closed
3/15/2010	5:24:59 PM	BCl3 valve closed
3/15/2010	5:24:59 PM	PH3 valve closed
3/15/2010	5:24:59 PM	SiCl4 pre valve closed
3/15/2010	5:24:59 PM	SiCl4 post valve closed
3/15/2010	5:24:59 PM	Main Vac valve closed
3/15/2010	5:24:59 PM	Bypass valve closed
3/15/2010	5:24:59 PM	Bubbler valve closed
3/15/2010	5:24:59 PM	H2 valve opened
3/15/2010	5:24:59 PM	Helium MFC set to  0.000000
3/15/2010	5:24:59 PM	H2 MFC set to  500.000000
3/15/2010	5:24:59 PM	BCl3 MFC set to  0.000000
3/15/2010	5:24:59 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:24:59 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:24:59 PM	Tube furnace set to 0
3/15/2010	5:26:19 PM	Helium valve closed
3/15/2010	5:26:19 PM	BCl3 valve closed
3/15/2010	5:26:19 PM	PH3 valve closed
3/15/2010	5:26:19 PM	SiCl4 pre valve closed
3/15/2010	5:26:19 PM	SiCl4 post valve closed
3/15/2010	5:26:19 PM	Main Vac valve closed
3/15/2010	5:26:19 PM	Bypass valve closed
3/15/2010	5:26:19 PM	H2 valve opened
3/15/2010	5:26:19 PM	Bubbler valve opened
3/15/2010	5:26:19 PM	Helium MFC set to  0.000000
3/15/2010	5:26:19 PM	H2 MFC set to  500.000000
3/15/2010	5:26:19 PM	BCl3 MFC set to  0.000000
3/15/2010	5:26:19 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:26:19 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:26:19 PM	Tube furnace set to 0
3/15/2010	5:33:40 PM	Helium valve closed
3/15/2010	5:33:40 PM	PH3 valve closed
3/15/2010	5:33:40 PM	Main Vac valve closed
3/15/2010	5:33:40 PM	Bypass valve closed
3/15/2010	5:33:40 PM	H2 valve opened
3/15/2010	5:33:40 PM	BCl3 valve opened
3/15/2010	5:33:40 PM	SiCl4 pre valve opened
3/15/2010	5:33:40 PM	SiCl4 post valve opened
3/15/2010	5:33:40 PM	Bubbler valve opened
3/15/2010	5:33:40 PM	Helium MFC set to  0.000000
3/15/2010	5:33:40 PM	H2 MFC set to  500.000000
3/15/2010	5:33:40 PM	BCl3 MFC set to  35.000000
3/15/2010	5:33:40 PM	SiCl4 MFC set to  325.000000
3/15/2010	5:33:40 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:33:40 PM	Tube furnace set to 0
3/15/2010	5:40:40 PM	H2 valve closed
3/15/2010	5:40:40 PM	BCl3 valve closed
3/15/2010	5:40:40 PM	PH3 valve closed
3/15/2010	5:40:40 PM	SiCl4 pre valve closed
3/15/2010	5:40:40 PM	SiCl4 post valve closed
3/15/2010	5:40:40 PM	Main Vac valve closed
3/15/2010	5:40:40 PM	Bypass valve closed
3/15/2010	5:40:40 PM	Helium valve opened
3/15/2010	5:40:40 PM	Bubbler valve opened
3/15/2010	5:40:40 PM	Helium MFC set to  500.000000
3/15/2010	5:40:40 PM	H2 MFC set to  0.000000
3/15/2010	5:40:40 PM	BCl3 MFC set to  0.000000
3/15/2010	5:40:40 PM	SiCl4 MFC set to  0.000000
3/15/2010	5:40:40 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	5:40:40 PM	Tube furnace set to 0
3/15/2010	6:00:40 PM	Helium valve closed
3/15/2010	6:00:40 PM	H2 valve closed
3/15/2010	6:00:40 PM	BCl3 valve closed
3/15/2010	6:00:40 PM	PH3 valve closed
3/15/2010	6:00:40 PM	SiCl4 pre valve closed
3/15/2010	6:00:40 PM	SiCl4 post valve closed
3/15/2010	6:00:40 PM	Main Vac valve closed
3/15/2010	6:00:40 PM	Bypass valve closed
3/15/2010	6:00:40 PM	Bubbler valve closed
3/15/2010	6:00:40 PM	Helium MFC set to  0.000000
3/15/2010	6:00:40 PM	H2 MFC set to  0.000000
3/15/2010	6:00:40 PM	BCl3 MFC set to  0.000000
3/15/2010	6:00:40 PM	SiCl4 MFC set to  0.000000
3/15/2010	6:00:40 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	6:00:40 PM	Tube furnace set to 0
3/15/2010	6:00:40 PM	Run finished at 6:00 PM
3/15/2010	6:15:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2010	6:15:18 PM	Recipe started at 6:15 PM
3/15/2010	6:15:18 PM	Helium valve closed
3/15/2010	6:15:18 PM	H2 valve closed
3/15/2010	6:15:18 PM	BCl3 valve closed
3/15/2010	6:15:18 PM	PH3 valve closed
3/15/2010	6:15:18 PM	SiCl4 pre valve closed
3/15/2010	6:15:18 PM	SiCl4 post valve closed
3/15/2010	6:15:18 PM	Main Vac valve closed
3/15/2010	6:15:18 PM	Bubbler valve closed
3/15/2010	6:15:18 PM	Bypass valve opened
3/15/2010	6:15:18 PM	Helium MFC set to  0.000000
3/15/2010	6:15:18 PM	H2 MFC set to  0.000000
3/15/2010	6:15:18 PM	BCl3 MFC set to  0.000000
3/15/2010	6:15:18 PM	SiCl4 MFC set to  0.000000
3/15/2010	6:15:18 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	6:15:18 PM	Tube furnace set to 0
3/15/2010	6:15:49 PM	Helium valve closed
3/15/2010	6:15:49 PM	H2 valve closed
3/15/2010	6:15:49 PM	BCl3 valve closed
3/15/2010	6:15:49 PM	PH3 valve closed
3/15/2010	6:15:49 PM	SiCl4 pre valve closed
3/15/2010	6:15:49 PM	SiCl4 post valve closed
3/15/2010	6:15:49 PM	Bubbler valve closed
3/15/2010	6:15:49 PM	Main Vac valve opened
3/15/2010	6:15:49 PM	Bypass valve opened
3/15/2010	6:15:49 PM	Helium MFC set to  0.000000
3/15/2010	6:15:49 PM	H2 MFC set to  0.000000
3/15/2010	6:15:49 PM	BCl3 MFC set to  0.000000
3/15/2010	6:15:49 PM	SiCl4 MFC set to  0.000000
3/15/2010	6:15:49 PM	Bypass solenoid MFC set to  0.000000
3/15/2010	6:15:49 PM	Tube furnace set to 0
3/15/2010	6:15:49 PM	Run finished at 6:15 PM
3/15/2010	6:15:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
